Gas Name
1
TLV LAL LDL
Default
Alarm
Level 1
Default
Alarm
Level 2
Range Alarm Setting
Initial Ana-
lysis Period
(second)
Time to 1 TLV (Alarm @ 2 TLV Concentration 10-ft.
Sample Line)
Chemcassette
Part Number
Phosgene XP
(COCl
2
) High Range
100 ppb 10 ppb 7 ppb 100 ppb 200 ppb 0-4000 ppb
10-49 ppb
50-99 ppb
100-199 ppb
200-4000 ppb
60
45
30
15
<25 sec 1295-0228
Phosgene XP4
(COCl
2
)
100 ppb 10 ppb 7 ppb 100 ppb 200 ppb 0-1000 ppb
10-49 ppb
50-99 ppb
100-199 ppb
200-1000 ppb
60
45
30
15
<25 sec 1257-9307
Phosgene XP4
(COCl
2
) High Range
100 ppb 10 ppb 7 ppb 100 ppb 200 ppb 0-4000 ppb
10-49 ppb
50-99 ppb
100-199 ppb
200-4000 ppb
60
45
30
15
<25 sec 1257-9307
Phosphine (PH
3
) 50 ppb 5 ppb 5 ppb 300 ppb 600 ppb 0-3000 ppb 5-3000 ppb 15 <20 sec (Alarm @ 300ppb with 600ppbPH
3
gas) 1295-0300
Phosphine XP (PH
3
) 50 ppb 5 ppb 5 ppb 300 ppb 600 ppb 0-3000 ppb 5-3000 ppb 15 <20 sec (Alarm @ 300ppb with 600ppbPH
3
gas) 1295-0226
Phosphine XP4
(PH
3
)
50 ppb 5 ppb 5 ppb 300 ppb 600 ppb 0-3000 ppb 5-3000 ppb 15 <20 sec (Alarm @ 300ppb with 600ppbPH
3
gas) 1257-9300
Silane (SiH
4
) 5 ppm 1 ppm 0.5 ppm 5 ppm 10 ppm 0-50 ppm
1-4.9 ppm
5-9.9 ppm
10-19.9 ppm
20-50 ppm
60
45
30
15
<35 sec 1295-0300
Silane-M XP (SiH
4
-
M)
5 ppm 0.06 ppm
0.05
ppm
2.5 ppm 5.0 ppm 0-15 ppm
0.05-2.49 ppm
2.5-4.99 ppm
5-9.99 ppm
10-15 ppm
180
60
45
30
<20 sec 1295-0226
Silane-M XP4 (SiH
4
-
M)
5 ppm 0.06 ppm
0.05
ppm
2.5 ppm 5.0 ppm 0-15 ppm
0.05-2.49 ppm
2.5-4.99 ppm
5-9.99 ppm
10-15 ppm
180
60
45
30
<20 sec 1257-9300
Silane XP (SiH
4
) 5 ppm 0.5 ppm 0.3 ppm 5 ppm 10 ppm 0-50 ppm
0.5-4.9 ppm
5-9.9 ppm
10-19.9 ppm
20-50 ppm
60
45
30
15
<30 sec 1295-0226
Silane XP (SiH
4
) Low
Level
5 ppm 50 ppb 50 ppb 250 ppb 500 ppb 0-5000 ppb
50-249 ppb
250-499 ppb
500-999 ppb
1000-5000 ppb
360
240
120
60
<100 sec (Alarm @ 500 ppb with 1 ppm SiH
4
gas) 1295-0226
Silane XP4 (SiH
4
) 5 ppm 0.5ppm 0.3 ppm 5 ppm 10 ppm 0-50 ppm
0.5-4.9 ppm
5-9.9 ppm
10-19.9 ppm
20-50 ppm
60
45
30
15
<30 sec 1257-9300
TLV - Threshold Limit Value LAL - Lowest Alarm Level LDL - Lower Detectable Limit
1. ā-1ā calibrations allow more stain development but will extend response times
2. Minimum Sample Time