Gas Name
1
TLV LAL LDL
Default
Alarm
Level 1
Default
Alarm
Level 2
Range Alarm Setting
Initial Ana-
lysis Period
(second)
Time to 1 TLV (Alarm @ 2 TLV Concentration 10-ft.
Sample Line)
Chemcassette
Part Number
Silane XP4 (SiH
4
)
Low Level
5 ppm 50 ppb 50 ppb 250 ppb 500 ppb 0-5000 ppb
50-249 ppb
250-499 ppb
500-999 ppb
1000-5000 ppb
360
240
120
60
<100 sec (Alarm @500 ppb with 1000 ppb SiH
4
gas) 1257-9300
Sulfur Dioxide (SO
2
) 250 ppb 30 ppb 25 ppb 250 ppb 500 ppb 0-2500 ppb
30-249 ppb
250-2500 ppb
60
30
<30 sec 1295-0552
Tertiary Butyl Arsine
(TBA)
0.5 mg/
m
3
as As
(OSHA)
15 ppb 12 ppb 50 ppb 100 ppb 0-500 ppb
15-49 ppb
50-99 ppb
100-199 ppb
200-500 ppb
120
60
30
15
<42 sec 1295-0300
Tertiary Butyl Arsine
XP (TBA)
0.5 mg/
m
3
as As
(OSHA)
15 ppb 12 ppb 50 ppb 100 ppb 0-500 ppb
15-24 ppb
25-49 ppb
50-99 ppb
100-500 ppb
120
60
30
15
<45 sec (Alarm @ 50 ppb with 100 ppb TBA gas) 1295-0226
Tertiary Butyl Arsine
XP4 (TBA)
0.5 mg/
m
3
as As
(OSHA)
15 ppb 12 ppb 50 ppb 100 ppb 0-500 ppb
15-24 ppb
25-49 ppb
50-99 ppb
100-500 ppb
120
60
30
15
<45 sec (Alarm @ 50 ppb with 100 ppb TBA gas) 1257-9300
Tertiary Butyl
Phosphine XP (TBP)
None Est 80 ppb 75 ppb 300 ppb 600 ppb 0-2000 ppb
80-149 ppb
150-299 ppb
300-599 ppb
600-2000 ppb
240
120
60
30
<70 sec (Alarm @300 ppb with 600 ppb TBP gas) 1295-0226
Tertiary Butyl
Phosphine XP4 (TBP)
None Est. 80 ppb 75 ppb 300 ppb 600 ppb 0-2000 ppb
80-149 ppb
150-299 ppb
300-599 ppb
600-2000 ppb
240
120
60
30
<70 sec (Alarm @ 300 ppb with 600 ppb TBP gas) 1257-9300
Tetrakis
Dimethylamino
Titanium XP (TDMAT)
None Est. 0.1 ppm 0.1 ppm 1.0 ppm 2.0 ppm 0-10.0 ppm
0.1-0.4 ppm
0.5-10.0 ppm
15
10
<20 sec 1295-0405
Tetrakis
Dimethylamino
Titanium XP4
(TDMAT)
Not Est. 0.1 ppm 0.1 ppm 1.0 ppm 2.0 ppm 0-10.0 ppm
0.1-0.4 ppm
0.5-10.0 ppm
15
10
<20 sec 1257-9309
TLV - Threshold Limit Value LAL - Lowest Alarm Level LDL - Lower Detectable Limit
1. ā-1ā calibrations allow more stain development but will extend response times
2. Minimum Sample Time