Edge Position Compensation
Two-edge Position Compensation
Two-edge Midpoint Compensation
Shape Search Position Compensation
Edge Rotation Position Compensation
Search Position Compensation
The position is offset in
only one direction.
The position is offset in
two directions.
The measure-
ment object is
not at an angle.
The position needs to be
corrected to the midpoint
between two edges.
There is a characteristic
pattern.
The measure-
ment object is
at an angle.
The position is corrected in either
the X or Y direction.
The position is corrected at the
same time in both the X and Y
directions.
The positions of two edges are detected and
then the coordinates of the midpoint between
those two positions is used to correct the
position in either the X or Y direction.
An image pattern is recognized to
detect and correct the position.
An image pattern is recognized to
detect and correct the position.
The positions of two edges are
detected and the angle of the line
that connects those positions is
used to correct the position.
There is a characteristic
pattern.
There is no characteristic
pattern.