Parameter
No.
MODBUS ad-
dress (MSB)
MODBUS ad-
dress (LSB)
Parameter name
Communica-
tion data for-
mat (during
single-word
access)
Communica-
tion data for-
mat (during
double-word
access)
W144 532Dh - Target Position Monitor (MSB) 2 -
W145 532Eh - Target Position Monitor (LSB) 1 -
W146 532Fh -
Position Deviation Monitor
(MSB)
2 -
W147 5330h -
Position Deviation Monitor
(LSB)
1 -
W148 5331h -
Touch Probe 1 Positive Edge
(MSB)
2 -
W149 5332h -
Touch Probe 1 Positive Edge
(LSB)
1 -
W150 5333h -
Touch Probe 2 Positive Edge
(MSB)
2 -
W151 5334h -
Touch Probe 2 Positive Edge
(LSB)
1 -
W152 5335h - Touch Probe Status 1 -
W153 5336h -
Pulse Input Rate for A/B
Phase of Reference Side
6 -
W154 5337h -
Pulse Input Rate for Z Phase
of Reference Side
1 -
W155 5338h -
Pulse Input Rate for A/B
Phase of Feedback Side
6 -
W156 5339h -
Pulse Input Rate for Z Phase
of Feedback Side
1 -
W161 533Eh -
Braking Resistor Thermal
Monitor
3 -
W178 534Fh - Number of Startups 5 -
W179 1014h 1015h Total RUN Time Monitor 1 1
W180 5351h - Tuning Progress 1 -
W202 53C2h - Reserved 12 -
W203 53C3h - Reserved 12 -
X00 5540h -
Latest Alarm History/Number
of Consecutive Same Alarms
41 -
X01 5541h - Latest Multiple Alarm1 10 -
X02 5542h - Latest Multiple Alarm2 10 -
X03 5543h - Latest Alarm Sub Code 1 1 -
X04 5544h -
Latest Multiple Alarm Sub
Code 2
1 -
X05 5545h -
Last Alarm History/Number of
Consecutive Same Alarms
41 -
X06 5546h - Last Multiple Alarm 2 10 -
X07 5547h - Last Multiple Alarm 3 10 -
X08 5548h - Last Alarm Sub Code 1 1 -
X09 5549h - Last Multiple Alarm Sub Code 1 -
X10 554Ah -
Second Last Alarm History/
Number of Consecutive Same
Alarms
41 -
8 Communications Functions
8-81
M1 Series Standard Type User's Manual (I669)
8-9 Modbus Communication Data Lists
8
8-9-2 Register List