51
Symptom
Door (fig.1(4) does not open.
Message ‘Potential vacuum
failure’ appears (Error 512).
Message ‘Place sample
holder correctly’ appears.
The system does not start
up after switching on the
power on the power supply.
The stage is stuck, makes
an unusual sound when it
moves or appears to be in
the wrong place.
The image is dark after
switching on the Phenom.
The image is partly dark at
the lowest magnification
factor.
Stigmation at the end of
range.
Pre-vacuum pump makes
excessive noise during
normal operation.
S
olution
Check that the is lit (green).
Touch the button on the button bar (fig. 3,10) to confirm sample is at unload
position.
Check that the sample holder seal is clean and uniformly seated around the sample holder.
If this happens during loading, the sample might be too wet (outgassing). Try to
unload the sample, remove the sample and load an empty sample holder to verify.
If unloading is not possible, call Phenom-World’s Customer Support.
If this message shows during installation make sure that the pre-vacuum pumphose is
connected and tightened correctly. Refer to 3.3 ‘Connecting the Phenom’.
Check that the sample holder seal is clean and uniformly seated around the sample holder.
Disconnect the power cable of the power supply from the wall outlet, remove the fuse
holder (fig. 1,16) from the power supply and check the fuses.
Replace the fuse if necessary (250V, T5A).
Call Phenom-World’s Customer Support.
Touch Auto to start an automatic Source Tilt alignment. Refer to 5.7.4.1 ‘Source Tilt’.
Align the Phenom electron beam (optimize the illumination intensity). Refer to 5.7.4.1
‘Source Tilt’.
This can be caused by contamination, charging or a magnetic sample.
Place a standard high-resolution SEM sample in the sample holder (at short working
distance) and redo the stigmator adjustment to verify if the stigmation can be adjusted
within the range.
In case of a magnetic sample, try to demagnitize the sample or use a longer working
distance (> 5mm (0.2") below the edge of the sample holder) to improve the
stigmation correction.
Shut down the Phenom and call Phenom-World’s Customer Support.
Shut down the Phenom and call Phenom-World’s Customer Support.
To Next Page
Loading...