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Aligna
®
4D User Manual
64 / 84
10.3.10.9.3 Nonlinearities
In the example measurement, you see a difference between the blue and the dark blue trace
(set and measured position Bx). In this setup, it is a property of inserted lenses, which are not
hit exactly in the center. However, this is a small effect of some percent; so it has no influence
to the servo loop performance.

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