22 Semiconductor Equipment and Materials International (SEMI)
Trident Planning and Installation Guide
Semiconductor Equipment and Materials
International (SEMI)
SEMI certifies the controller for use in environmental, health, and safety
applications in semiconductor manufacturing facilities as defined by the following
standard.
Test Report
A copy of the test report is available upon request.
Installation Guidelines
For semiconductor manufacturing applications, compliance with the following
guidelines is highly recommended:
• Field and logic power supplies should be approved for use in safety extra-
low-voltage (SELV) circuits according to the requirements of IEC 61010-1
• An application may require a specified environment and warning label
– For installations with voltages greater than 30 V
rms
/36 V DC, the
controller and associated equipment must be installed in a locked cabinet
with a hazardous-voltage warning label attached prominently
– For installations with ambient temperatures exceeding 35
°C (94°F), the
controller and associated equipment should be installed in a locked
cabinet with a hot-surface warning label attached prominently
– For applications in which continuous, correct system operation must be
assured, the controller and associated equipment should be installed in a
locked cabinet with a general-hazard warning label attached prominently
For a physical description of labels, see Appendix H, “Warning Labels.”
Standard
Number
Title
SEMI S2-0200 Environmental, health, and safety guidelines for semiconductor
manufacturing equipment
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