Vacuum system 1-15
Vacuum system
An external roughing (rotary vane) pump and an internal split-flow
turbomolecular pump combine to create the source vacuum. The
turbomolecular pump evacuates the analyzer and ion transfer region.
Vacuum leaks and electrical or vacuum pump failures cause vacuum loss,
which protective interlocks guard against. The system monitors
turbomolecular pump speed and continuously measures vacuum pressure
with a built-in Pirani gauge. The gauge also serves as a switch, stopping
operation when it senses vacuum loss.
A vacuum isolation valve isolates the source from the mass analyzer, allowing
routine source maintenance without venting.
Rear panel
The following figure shows the rear panel locations of the connectors used to
operate the instrument with external devices.
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