Zeiss Crossbeam 340 - Change of Consumables and Chemicals

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7.3. Change of consumables and chemicals
The change of consumables and chemicals have to be done by a Carl Zeiss servce engineer in
mandatory intervals.
The times scheduled are designed for the maximum equipment performance level:
1
There is no warranty on field emission guns; manufacturers do not guarantee any lifetime.
Interval Component/Part
Every 6000 h
1
(filament on)
Field emission gun
1
Copper seal at gun head
As required or yearly
(and after exchange of field emission gun)
Standard aperture
Anode aperture
Extractor aperture
Anode aluminium seal
Copper seal at gun head
Yearly or as required Pre-vacuum pump
Yearly SE2 detector
In-lens SE detector
As required Ion source
With every ion source replacement FIB aperture
Upgraded workstation
If used up Precursors
Table 7.1: Time schedule