Zeiss Crossbeam 340 - Gas Injection System (GIS); Charge Compensator; Airlock; Rapid Laser Ablation Upgrade

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Probe currents

After passing the condenser, the beam current is defined by a set of software-controlled mechan-

ical apertures. By using the different apertures in combination with the different condenser set-

tings, the probe current can be continuously adjusted in the range between 1 pA and 50 nA.

Among other things, the probe current depends on aperture size and condenser settings.

Objective lens The objective lens is designed as an electrostatic einzel-lens system to focus the beam onto the

specimen surface.

3.4.4. Gas injection system (GIS)

For information regarding the gas injection system refer to the instruction manual of MultiGIS or

Single GIS.

3.4.5. Charge Compensator

For information regarding the gas injection system refer to the instruction manual Charge Com-

pensator.

3.4.6. Airlock

For information regarding the Airlock refer to the instruction manual 80 mm Airlock or 200 mm Air-

lock.

3.4.7. Rapid Laser Ablation Upgrade

For information regarding the Rapid Laser Ablation Upgrade refer to the instruction manual Rapid

Laser Ablation Upgrade.