PK=aÉëÅêáéíáçå
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM=ÉåMOE`loF =QT=çÑ=N PQ
qÉÅÜåáÅ~ä=Ç~í~
3.5. Technical data
3.5.1. Specifications
Performance
SEM Resolution High resolution configuration
(max.probe current 20 nA)
Optimum Working distance:
0.9 nm at 30 kV (STEM mode)
1.0 nm at 15 kV
1.9 nm at 1 kV
Acceleration voltage Range: 0.02 kV - 30 kV (SEM)
Adjustment: Continuously variable in 10 Volt steps.
Probe Current
SEM
5 pA to 20 nA High resolution option
12 pA to 100 nA High Current option
Magnification Range: 12x – 2.000.000x (SEM)
Adjustment: Continuously variable in either coarse or fine modes.
Auto-Compensation: Magnification is precisely corrected
automatically for changes in working distance or acceleration
voltage.
Electron optics
Electron source Filament: Schottky field emitter.
Alignment: Two stage electromagnetic emitter alignment utilizing emission
imaging mode
Automatic Emitter Run-Up: Safe controlled run-up of the target emitter
conditions
Indicators: Status information in Software to indicate all emitter parameters
Lens control Patented GEMINI I VP electromagnetic/electrostatic objective lens system
(68º conical final-lens) with water cooling for best thermal stability and
reproducibility
Hysteresis Correction: Built-in, for the removal of lens hysteresis
To Next Page
Loading...