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Table of contents
1. About this instruction manual .................................................................... 7
1.1. Safety instructions in this manual .................................................................. 8
1.2. Typographical conventions ............................................................................ 9
1.3. Definition of terms ......................................................................................... 10
2. Safety .......................................................................................................... 11
2.1. Intended use ................................................................................................... 11
2.2. Prevention of accidents and of improper use ............................................. 12
2.3. Safety summary ............................................................................................. 13
2.3.1. Hazards related to personal injury ......................................................................... 13
2.3.2. Hazards not related to personal injury ................................................................... 16
2.4. Safety equipment ........................................................................................... 16
2.4.1. Safety devices ....................................................................................................... 16
2.4.1.1. Protective cover panels................................................................................................. 16
2.4.1.2. Interlock system ............................................................................................................ 17
2.4.1.3. MAIN switch .................................................................................................................. 17
2.4.1.4. Start button S2 (with optional EMO function only)......................................................... 18
2.4.1.5. EMO button (optional, but mandatory for compliance with SEMI S2) ........................... 18
2.4.1.6. Main shut-off valves ...................................................................................................... 19
2.4.2. Safety labels and labels ........................................................................................ 19
2.4.2.1. At the front of the microscope ....................................................................................... 20
2.4.2.2. At the rear of the electron optical column...................................................................... 21
2.4.2.3. At the rear of the microscope ........................................................................................ 22
2.4.2.4. Inside microscope ......................................................................................................... 23
2.4.3. Material Safety Data Sheets .................................................................................. 23
3. Description ................................................................................................. 25
3.1. Workstation .................................................................................................... 25
3.2. Control elements ............................................................................................ 26
3.2.1. SmartSEM
®
user interface .................................................................................... 26
3.2.1.1. Main areas in SmartSEM
®
............................................................................................ 26
3.2.1.2. SmartSEM
®
controls ..................................................................................................... 27
3.2.2. Dual joystick .......................................................................................................... 28
3.3. Principle of operation .................................................................................... 29
3.3.1. Vacuum system ..................................................................................................... 29
3.3.2. Electron optics (GEMINI
®
column) ........................................................................ 33
3.3.3. Imaging modes ...................................................................................................... 34
3.3.4. Signal detection ..................................................................................................... 35
3.3.4.1. In-lens SE detector........................................................................................................ 36
3.3.4.2. SE2 detector.................................................................................................................. 37
3.3.4.3. VPSE detector............................................................................................................... 39
3.3.5. Specimen stage ..................................................................................................... 40
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