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Before the electron beam exits the objective lens (6), the electrostatic lens creates an opposing
field which reduces the potential of the electrons by + 8 kV. The energy of the electrons reaching
the specimen surface therefore corresponds to the set acceleration voltage (EHT).
Signal detec-
tion
When the primary electron beam hits the specimen, certain interaction products are released,
which can be recorded by specific detectors.
3.3.3. Imaging modes
The following imaging modes are available:
Imaging mode FIB Mode.. Characteristics Typical application
SEM imaging SEM Electron beam is active,
ion beam is blanked.
The SE signal is synchronised
to the SEM scan.
High resolution FESEM
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