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6.6. Setting SEM parameters
6.6.1. Viewing the probe current
The probe current is determined by the selected multihole aperture.
The achievable maximum probe current depends on the currently selected EHT and the installed
configuration (20 nA high resolution/100 nA high current).
6.6.1.1. Changing the extractor voltage
CAUTION
Performance and resolution of the microscope can be impaired.
Avoid reducing the extractor voltage.
If at all, reduce the extractor voltage only for a short time (1-2 h) and by maximum 500 V.
The extractor voltage is preset by the factory or by the Carl Zeiss service engineer.
Within certain limits, the operator may carefully alter the extractor voltage in order to optimise the
probe current for particular applications.
IMPORTANT
The newly set extractor value is only valid for the current work session.
After a restart of the SmartSEM software, the microscope will restore the nominal extractor
voltage.
Procedure
1 In the SEM Control panel, select the Gun tab.
2 To increase the extractor voltage, double-click
the Extractor V = field.
The Extractor V window appears.
3 Enter a higher value and click the OK button.
Increasing the extractor voltage may be suita-
ble to increase the probe current.
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