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3.3.5. Specimen stage
Standard specimen stage is a 6-axes motorised eucentric stage.
The specimen stage is controlled by the SmartSEM
®
software. The stage can be operated by the
dual joystick controller or by using the soft joystick in the SmartSEM
®
user interface.
The axes are called:
The stage is an eucentric one, which means that all rotation axes intersect in the same point. The
specimen surface is located in the eucentric point, where the tilt axis meets the beam axis. This
guarantees that the focus is maintained when the specimen is tilted at a certain working distance.
When moving a tilted specimen, the specimen is also moved unintentionally in Z direction. The 6-
axes super-eucentric stage is equipped with an additional M-axis, which allows you to move the
specimen surface into the tilt angle at various working distances.
X X-axis
Y Y-axis
Z Height
M Height
R Rotation
T Tilt
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