Zeiss Crossbeam 340 - Options

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3.4. Options
There is a variety of options available for example additional detectors, licenced software func-
tions, sample holders.
For details, contact your local Carl Zeiss service engineer or sales representative.
3.4.1. Applications
The basic workstation of Crossbeam 340 consists of a field emission scanning electron micro-
scope with GEMINI
®
column.
The following table shows applications and the required upgrade stages:
+
2
Five-channel GIS or Single GIS
+
3
Charge Compensator
+
4
Five-channel GIS with integrated charge compensation (CC)
Applications
Upgrades
FIB GIS
Charge
compensation
(CC)
SEM operation
---
SEM operation, FIB imaging
Milling
+--
SEM operation, FIB imaging
Milling
Gas assisted etching
Gas assisted deposition
Electron beam deposition
Electron beam etching
+
2
+
2
-
SEM operation, FIB imaging
Imaging of non-conductive speci-
mens
Milling
Gas assisted etching
Gas assisted deposition
Electron beam deposition
Electron beam etching
+
2 / 4
+
2 / 4
+
3 / 4