Zeiss Crossbeam 340 - System Layout

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3.5.4. System layout
1
2
1
1
34
5
2
6
3
4
5
No Description
Size (mm)
approx.
Weight (kg)
approx.
Distribution
of load (kg)
Footprints
1 Plinth + column 940 x 1083 x 1750 870 4 x 222.5 4 x Ø 80 mm
Plinth + column + Capella FIB 940 x 1082 x 1700 920 4 x 230 4 x Ø 80 mm
Plinth + column + Capella FIB
+ 200mm-airlock
1060 x 1082 x 1700 950 4 x 238 4 x Ø 80 mm
Plinth + column + 200mm-air-
lock
940 x 1082 x 1700 900 4 x 225 4 x Ø 80 mm
2 Table + PC 1153 x 980 x 1350 97 4 x 24.3 4 x Ø 50 mm
3 Dynamic damping block 200 x 200 x 290 26 1 x 26.0 200 mm x 200 mm
4 Static damping block 180 x 180 x 160 36.6 1 x 36.6 180 mm x 180 mm
5 Pre-vacuum pump 430 x 250 x 290 24.5 1 x 24.5 200 mm x 180 mm