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3.4. Options ............................................................................................................41
3.4.1. Applications ........................................................................................................... 41
3.4.2. Control panel ......................................................................................................... 42
3.4.3. Ion optics (FIB column) .......................................................................................... 43
3.4.4. Gas injection system (GIS) .................................................................................... 44
3.4.5. Charge Compensator ............................................................................................ 44
3.4.6. Airlock .................................................................................................................... 44
3.4.7. Rapid Laser Ablation Upgrade .............................................................................. 44
3.4.8. Detectors ...............................................................................................................45
3.4.8.1. In-lens Duo detector...................................................................................................... 45
3.4.8.2. SESI detector................................................................................................................ 46
3.5. Technical data .................................................................................................47
3.5.1. Specifications ........................................................................................................ 47
3.5.2. Installation requirements ....................................................................................... 52
3.5.3. Layout and connections ........................................................................................ 54
3.5.4. System layout ........................................................................................................ 55
3.6. Customer service ............................................................................................56
3.7. Radiation protection .......................................................................................56
4. Transport and storage ...............................................................................57
4.1. Transport .........................................................................................................57
4.2. Storage ............................................................................................................58
5. Installation ...................................................................................................59
6. Operation .....................................................................................................61
6.1. Switching on the microscope ........................................................................61
6.2. Starting the SmartSEM
®
user interface ........................................................62
6.3. Finding your way in the SmartSEM
®
user interface ....................................63
6.3.1. Showing or hiding toolbars .................................................................................... 63
6.3.2. Showing or hiding the data zone ........................................................................... 63
6.3.3. Showing a full screen image .................................................................................. 64
6.3.4. Preparing the docking panel for operation ............................................................. 64
6.3.4.1. Showing the docking panel........................................................................................... 64
6.3.4.2. Adding control panels to the docking panel .................................................................. 65
6.4. Obtaining a first image ...................................................................................66
6.4.1. Preparing the sample holder ................................................................................. 67
6.4.2. Loading the specimen chamber ............................................................................ 68
6.4.3. Locating the specimen .......................................................................................... 71
6.4.4. Switching on the gun ............................................................................................. 73
6.4.5. Switching on the EHT ............................................................................................ 74
6.4.6. Generating an image ............................................................................................. 75
6.4.7. Optimising the image ............................................................................................. 77
6.4.8. Saving the image ................................................................................................... 80
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