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Focus Working Distance: Range from 1 mm - 50 mm, depending on
acceleration voltage.
Manual Control: Coarse and fine control. Sensitivity related to magnifica-
tion
Automatic Focus Control
Focus Compensation: Automatic compensation to minimise focus
changes over the entire acceleration voltage and probe current range
Dynamic Focus: For correction of focus on tilted specimens
Rotation Compensation: Automatic correction of apparent image rotation
with changes in working distance
Stigmator Type: Eight pole electromagnetic
Control: X and Y adjusted by using Hardpanel or PC mouse
Apertures High Resolution option (20 nA) 7 apertures
Sizes: 7, 10, 15, 20, 30, 60 120 µm
High Current option (100 nA) 6 apertures
Sizes: 10, 20, 30, 60, 120, 300 µm
Electromagnetic selection; Precise alignment due to retrievable coordi-
nates.
Focus Wobble: For assistance in aperture alignment, with adjustable
amplitude and speed.
Beam shift Control: Adjustment with hardpanel or PC mouse. For precise adjustment
of image position at high magnifications.
200 µm (±100 µm) at 20 kV, WD = 8.5 mm
Specimen chamber and stage
Specimen chamber Dimensions: 330 mm inner diameter and 270 mm height.
Free Accessory Ports: 18 (for EDS, EBSD, SIMS, manipulators etc.)
Chamber Viewing: Two infrared CCD cameras provided as standard
Analytical Working Distance: 8.5 mm
Coincidence point of electron and ion beam: 5 mm (SEM), 12 mm (FIB)
Column Arrangement: The angle between electron-optical and focused
ion beam-column is 54 degrees.
EDS Take-off Angle: 35 degrees.
Electron optics
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