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Detectors
In-lens detector In-lens SE
High efficiency annular scintillator detector mounted in
GEMINI® column with optically coupled photomultiplier.
Chamber detectors Types:
a Everhart-Thornley SE detector with optically coupled photomultiplier.
Collector bias adjustable from -250 to +400 V.
b Specimen Current Monitor (SCM): 6 range auto ranging for precise cur-
rent measurement in the area of 1 pA to 10 µA.
c High efficiency variable pressure SE detector (VPSE, Standard). For SE
detection under variable pressure conditions.
Optional detectors Types:
a In-lens Duo (optional, replaces In-lens SE) Column-mounted scintillator
detector with filtering grid adjustable from 0 V to –1.5 kV for energy filter-
ing and optically coupled photomultiplier. Enables two detection modes
(Simultaneous usage of the two detection modes is not possible):
- SE detection mode: high efficiency SE detection with disabled filtering
grid
-BSE detection mode: high efficiency detection of energy and angle
selective backscattered electrons using the energy filtering grid
b Combined Secondary Electron Secondary Ion (SESI) detector based on
a scintillator photomultiplier system; easy change between secondary
ion and secondary electron mode by converting the electrode voltage
(optional, replaces ET-SE-detector)
c Annular Scanning Transmission Electron Microscopy (aSTEM) detector
(optional), pneumatically retractable for annular detection of bright field
(BF), darkfield (DF) and high angle annular dark field (HAADF)
d 4-Channel Back Scattered Detector (BSD4, optional), pneumatically
retractable
Detector Control Automatic Contrast/Brightness
Manual Contrast/Brightness
Detector Selection and Mixing: Select between up to 12 detector chan-
nels and up to 3 TV inputs (optional); Any two detector signals can be mixed
for enhanced image information. Camera image and detector images can
be displayed simultaneously.
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