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6.13.1. Switching off in an emergency with EMO option installed ................................. 107
6.13.2. Switching off in an emergency without EMO option installed ............................ 107
6.13.3. Switching on again the microscope after an emergency off .............................. 108
7. Maintenance and repair ...........................................................................109
7.1. Maintenance work .........................................................................................109
7.2. Maintenance intervals ..................................................................................109
7.3. Change of consumables and chemicals ....................................................110
8. Troubleshooting .......................................................................................111
8.1. Overview ........................................................................................................111
8.2. Chamber ........................................................................................................113
8.2.1. Initialising the stage ............................................................................................. 113
8.2.2. Replacing the chamber door seal ........................................................................ 113
8.3. Column ..........................................................................................................115
8.3.1. Baking out the gun head ..................................................................................... 115
8.3.2. Ion source ............................................................................................................ 116
8.3.2.1. Checking the lifetime of the ion source....................................................................... 116
8.3.2.2. Regenerating by heating............................................................................................. 116
8.4. Power circuit .................................................................................................119
8.4.1. Checking the circuit breakers .............................................................................. 119
9. Shutdown and disposal ...........................................................................121
9.1. Putting the microscope out of operation ...................................................121
9.2. Disposal .........................................................................................................122
9.2.1. Disposing of solid waste (consumables) ............................................................. 122
9.2.2. Disposing of the microscope ............................................................................... 122
10. Parts and tools ........................................................................................123
10.1. Important consumables .............................................................................123
10.2. Important spare parts .................................................................................124
10.3. Tools and accessories ...............................................................................124
11. Abbreviations ..........................................................................................125
12. Glossary ..................................................................................................127
13. Declaration of conformity ......................................................................129
14. Index ........................................................................................................131
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