VS=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM=ÉåMOE`lo F
SK=léÉê~íáçå
`êçëëÄÉ~ã=çéÉê~íáçå
Below the Off button, the emission current is
shown.
The emission current should be about 2 µA.
The background of the button can have several
colours.
Green background:
The emission current equals the target
(+/- 0.1 µA).
Yellow background:
The emission current differs from the target by
more than 0.1 µA.
Red background:
The suppressor voltage has almost reached its
limit.
The emission target can not be reached.
IMPORTANT
If you intend to deposit platinum with the optional GIS, you should start heating the plati-
num precursor now, refer to section 6.6.4.1.