Field Service Manual December 2003
Page 195 of 276
When you have more beams next to each other for exposure the carraige can move
over a bigger distance X after one turn of the drum. So the more beams you have the
faster you can expose.
Lets go back into the past.
The first multibeam optic(more then 4 beams)with TRIP could have 12 or 24 beams.
The beams which are used for exposing are generated by the modulator. A modulator
has 6 layer where the 6 direct laserbeams are passing through. So after the modulator
you could have 6 groups of two beams(12 beam plotter) on top of eachother or 6
groups of four beams on top of eachother(24 beam plotter). If the beams would go
straigth to the drum the position of the beams on the drum would be like this for a 24
beamer and a 12 beamer.
24 beam
The more beams you have the bigger the distance can be between the first and the last
beam.
After one turn of the drum the carriage has to be moved over a certain distance. For a
SW860(24 beams optic) the distance between the most left and most rigth beam is
100e6 300e6
X : Movement of carriage after one turn of the drum is 6,35 um when exposing
on 4000ppi and with one beam.
x
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