DOD Technologies ChemLogic CL96 - Name

DC-TEC-MAN-CL96_B
DODtec.com
REV 1/9/2024 815-788-5200
Page 72 solutions@dodtec.com
ChemLogic® CL96 Operating Manual
Name Gas Gas Family
Calibration
PN2
TLV
Full
Scale
LDL Units
ChemLogi
c Cassette
PN
Fluorine (SG)
F2
Chlorine-
SG
2-800-414
100
1,000
41.6
ppb
1-560-150
Fluorosilicic acid^
H2SiF6
(HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Germane
GeH4
Hydrides
2-800-401
200
2,000
62.1
ppb
1-300-050
Germane
GeH4
Hydrides
(LL)
2-800-406
200
2,000
62.1
ppb
1-300-050
Germanium Tetrafluoride^
GeF4 (HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Hexachlorodisilane^^
SiCl2 (HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Hexafluorocyclobutene**
C4F6
Pyro
2-800-415
5
40
1.5
ppm
1-420-150
Hydrogen Chloride
HCl
MA-SG
2-800-409
2
15
0.1
ppm
1-420-150
Hydrogen Chloride
HCl
MA-SG
2-800-409
2
20
0.1
ppm
1-420-150
Hydrogen Bromide
HBr
MA-SG
2-800-409
2
20
0.1
ppm
1-420-150
Hydrogen Fluoride
HF
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Hydrogen Fluoride
HF
MA-SG
2-800-409
0.5
20
0.2
ppm
1-420-150
Hydrogen Selenide
H2Se
Hydrides
(LL)
2-800-406
50
500
5.1
ppb
1-300-050
Hydrogen Sulfide
H2S
Hydrides
2-800-401
1
20
0.2
ppm
1-300-050
Nitric Acid
HNO3
MA-SG
2-800-409
2,000
5,000
187.5
ppb
1-420-150
Nitrogen Dioxide
NO2
Oxidizers
2-800-408
0.2
30
1.3
ppm
1-550-050
Nitrogen Trifluoride**
NF3
Pyro
2-800-415
10
50
1
ppm
1-420-150
Phenyl Trichlorosilane^^
SiCl3Ph
(HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Phosgene
COCl2
Phosgene
2-800-404
100
5,000
8.8
ppb
1-200-050
Phosgene
COCl2
Phosgene
2-800-404
100
3,250
8.8
ppb
1-200-050
Phosgene
COCl2
Phosgene
2-800-404
100
300
3.9
ppb
1-200-050
Phosphine
PH3
Hydrides
2-800-401
50
1,500
4.9
ppb
1-300-050
Phosphine
PH3
Hydrides
2-800-401
50
3,000
4.9
ppb
1-300-050
Phosphorus Oxychloride^^
POCl3
(HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150