DOD Technologies ChemLogic CL96 - Name

DC-TEC-MAN-CL96_B
DODtec.com
REV 1/9/2024 815-788-5200
Page 73 solutions@dodtec.com
ChemLogic® CL96 Operating Manual
Name Gas Gas Family
Calibration
PN2
TLV
Full
Scale
LDL Units
ChemLogi
c Cassette
PN
Phosphorus Pentachloride^^
PCl5 (HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Phosphorus Pentafluoride^
PF5 (HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Phosphorus Tribromide^^^
PBr3 (HBr)
MA-SG
2-800-409
2
20
0.1
ppm
1-420-150
Phosphorus Trichloride^^
PCl3 (HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Phosphorus Trifluoride^
PF3 (HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Silane
SiH4
Hydrides
2-800-401
5
50
0.2
ppm
1-300-050
Silane
SiH4
Hydrides
2-800-401
5,000
15,000
40
ppb
1-300-050
Silicon Tetrachloride^^
SiCl4 (HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Sulfur Dioxide
SO2
SO2
250
2,500
19.3
ppb
1-810-050
Sulfur Tetrafluoride^
SF4 (HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Sulfuric Acid
H2SO4
MA-SG
2-800-409
50
3,200
97.1
ppb
1-420-150
Tetrakis(dimethylamido)titaniu
m
TDMAT
Ammonia
2-800-405
2
10
0.1
ppm
1-700-050
Tertiary Butyl Arsine
TBA
Hydrides
2-800-401
91
500
12
ppb
1-300-050
Tetrafluorosilane^
SiF4 (HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
Titanium Tetrachloride^^
TiCl4 (HCl)
MA-SG
2-800-409
2
15
0.1
ppm
1-420-150
Tin Tetrachloride^^
SnCl4 (HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Trichlorosilane^^
SiHCl3
(HCl)
MA-SG
2-800-409
2
15
0.2
ppm
1-420-150
Tungsten Hexafluoride^
WF6 (HF)
MA-SG
2-800-409
0.5
10
0.2
ppm
1-420-150
* Additional ranges may be available and are subject to change. Please see specific product brochure or
contact DOD Technologies.
** Requires pyrolyzer option for detection
^ Compounds which hydrolyze to HF
^^ Compounds which hydrolyze to HCl
^^^ Compounds which hydrolyze to HBr
MA-SG = Mineral Acid SG
Hydrides (LL) = Hydrides (Low-Level Arsine)