Edwards SCU-800

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 115
7
MAINTENANCE
Referred
section
3.9
Instruction
Manual
(A)
*1
The driver output stops and the rotor continues rotating by inertia.
It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into th
e STP pump.
Table
35 - Error
messages after self test (continued)
Countermeasures
1. When changing the cable
length, perform tuning.
2. Contact
Service office
.
1. Remove external vibration
so as not to transmit it to the STP
pump.
2. Check
the vacuum piping.
3. Install the STP
pump in a
way that no foreign matter falls into the STP
pump.
Contact
Service office
.
Contact
Service office
.
Contact
Service office
.
1. Contact
Service office
.
2. Contact
Service office
.
1. Contact
Service office
.
2. Contact
Serv
ice office
.
Probable causes
Abnormal magnetic bearing:
1. Change of the cable
length.
2. Disconnection of the STP
connection cable or control circuit error.
Excessive vibration applied externally to the STP
pump:
1. External vibration/impact. 2. Atmospheric air fl
ows into
the STP
pump.
3. Foreign matter falls into
the STP
pump.
Failure of the SCU
-800.
Failure of the
SCU
-800.
Failure of the
SCU
-800.
1. Wear
-out of the cooling
water bearing
.
2. Failure of the cooling fan
drive circuit
.
1. Short of the STP
connection
cable.
2. STP
pump failure.
Pump operation
Contact noise and vibration of the rotor are generated from the STP
pump.
Decelerate and stop.
Decelerate and stop.
Free run
.
*1
Decelerate and stop
.
Decelerate and stop
.
Free run
.
*1
Occurrence condition
Excessive imbalanc
e.
Failure of serial communication.
Abnormal CPU operation
.
Abnormal driver operation
.
Cooling fan come to a stop
.
Driver
over current
.
LCD Messages
Disturbance X_B
Disturbance X_H Disturbance Y_B Disturbance Y_H Disturbance Z
Driver Com Failure
Driver
CPU Error
Driver Failure
Driver FAN Failure
Driver Overcurrent