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SCU-800
Edwards SCU-800 User Manual
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SCU-800 Control
Unit for Turbomolec
ular Pump
MT
-
49
E-
101
-G
Page
79
5
SERIAL COMM
UNICATION
PROTO
COL
Communication cycle start
Succeeded?
Decode process
Error process
Address selection:
First TMP
RS485 multipoint
connection?
Address selection:
Next T
MP
Communication cycle end
Command sending process
Succeeded?
Answer receiving process
Y
es
This procedure is not
necessary
if TMP
connection numbe
r = 1.
No
Y
es
Y
es
Y
es
Y
es
No
No
No
No
RS485 multipoint
connection?
Address check:
Last TMP?
Figure
46
-
Example of com
munication cycle proc
ess
90
92
Table of Contents
Declaration of Conformity
2
Table of Contents
5
Introduction
13
Scope and Definitions
13
Applied Standards
14
Limited Warranty
14
Warranty Period
14
Item Warranted
15
Disclaimer
15
Spare Parts
15
High Voltage Device Caution Label
16
Voltage Caution Label
16
Labels
16
Voltage Rating Label
17
Safety Instruction Label
18
Connector Caution Label
18
Label Affixing Positions
18
Turbomolecular Pumps
19
Cable Sets
20
General Description
19
Technical Data
21
Specifications
21
Installation
25
Unpacking
25
Front Panel
25
Rear Panel
28
Precautions before Installation
29
Operating Environment
29
Insulation Test
29
Installation Area
30
Example of Securing the SCU-800
31
Attaching the SCU-800 to a Rack
31
Cable Connection
32
STP Connection Cable
33
STP Connection Cable Specification
33
TMS Connection Cable
34
STP Pump Connection Cable
33
TMS Connection Cable (Standard)
34
TMS Connection Cable (STP-A1603 Series)
34
Power Cable
35
Connecting to Semiconductor Equipment
37
Connecting to Power
37
Emergency off Circuit (EMO Circuit)
37
Connector X3A, X3B, X6 (D-Sub 9)
38
Remote Communication
38
Parallel Communication
38
Serial Communication
38
Adjustment Methods
39
Tuning
39
Tuning Method
39
Change of Data after Tuning
41
Remote Mode
41
Confirmation Mode
42
Confirmation Method
42
Parameter Set Mode
44
Remote Operation Setting
44
Rotational Speed Setting
44
TMS Setting
44
Rotational Inhibit Signal Setting
44
Emergency Vent Valve Setting
44
Second Damage Limit
45
Pump Air-Cooling Fan Output Setting
45
Warning Function Setting
46
Serial Port COM1 Setting
47
Serial Port COM2 Setting
47
Serial Port COM3 Setting
47
Date/Time Setting
47
Factory Setting
47
Parameter Setting Procedure
48
Parameter Setting Method
49
Parameter Setting Method (Continued)
50
Parameter Setting Method (Continued)
53
Manual Operation Mode
54
Manual Operation Method
54
Operation
55
Before Starting the STP Pump
55
Confirmation before Starting
55
Confirmation of Vacuum System
55
Powering on
56
Self Test
56
CAUTION" Message in the Self Test State
56
How to Start/Stop the STP Pump
57
Manual Start/Stop the STP Pump
57
Starting the STP Pump
57
Stopping the STP Pump
57
Starting the STP Pump after Stopping
57
Remote Operation
59
Input Signal Pins
59
REMOTE X7 Input Signal Pins
60
Output Signal Pins
61
REMOTE X7 Input Signal Pins
61
REMOTE X7 Output Signal Pins
62
REMOTE X7 Output Signal Pins
63
Remote Setting
64
Starting/Stopping the STP Pump
64
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
64
Rotation INHIBIT Signal Input
65
Starting the STP Pump after Stopping
66
Starting the STP Pump after a Safety Function Operates
66
Rotation INHIBIT Signal
65
Powering off
66
Operating the TMS Unit (for Use with the TMS Unit)
67
Before Starting
67
Starting/Stopping
67
Setting the TMS Unit Function
67
Temperature Control
67
Serial Communication Protocol
69
Introduction
69
Serial Communication
69
Connection and Setting up
70
Signal Connection
70
Connector X3A/X3B (D-Sub 9)
70
X6 Pin Position
71
Connecting the RS485
72
Communication Parameter Setting
74
Communication Parameters
74
Recommended Items about Communication Cable Installation
75
Grounding Example (both Ends Grounding)
75
Grounding Example (Single Point Grounding)
75
Protocol Specifications
78
General Description
78
Pump Operation Commands
78
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
79
Control Command
80
(In the RS232/RS485 Single Point Connection)
80
Transmission Data Format
82
Frame Control (Checksum)
82
Error Control
83
Transmission Frame in the RS485 Multi-Point Connection
84
Control Command in the RS485 Multi-Point Connection
85
Query Command in the RS485 Multi-Point Connection
87
Broadcasting Command in the RS485 Multi-Point Connection
88
Pump Operation Commands
88
Application Note
89
Example of Answer Resending Process
90
Example of Command Sending During Answer Data Reply
90
Example of Command Sending Process
92
Example of Answer Receiving Process
92
Command Specifications
93
Command List
93
Readmeas
94
Command
94
Readfailmess
95
Error Message Values
97
Readmodfonct
98
Error Message Values (Continued)
98
Pump Operation Mode
99
Readversion
100
Control Unit
100
Readcounters
101
Readsetpoint
102
Readmotortemp
102
Readstatus
103
Readevents
104
Setspeedsetpoint
105
Readspeedsetpoint
106
Readmodfonctwithwarning
107
Readmeasvalue
110
Stp-Link
113
Maintenance
115
Safety Functions
115
Power Failure
115
Backup Rotational Speed
115
Operation after a Power Recovery
116
Abnormal State of Magnetic Bearing
116
States of LCD, Leds and REMOTE Output Signals at a Power Failure
116
Excessive Vibration
117
Motor Driver Overload
117
Overheating Inside the STP Pump
117
Overheating Inside the SCU-800
117
Overspeed
117
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
118
Failure of the Air-Cooling Fan
118
WARNING" Message Function
119
WARNING" Message Display Function
119
WARNING" Message Description
120
Damage Point Function
120
First Damage Limit
120
Second Damage Limit
120
Imbalance X_H, X_B, Z
121
Pump Run Time over
121
Pump Overload
121
Low RTC Battery
121
Default Setting of "WARNING" Function
122
Factory Setting and Variable Range
122
WARNING" Function Setting
122
Error Messages at Self Test State
123
Error after Self Test
124
Error Messages
124
Troubleshooting Immediately after Power Failure Occurs
124
Troubleshooting Immediately after Other Abnormality/Errors Occur
125
Error at Self Test State
123
Troubleshooting When Powering on
133
Troubleshooting When Performing the STP Pump Start Operation
133
Other Abnormalities
134
When Error Message Is Not Displayed on LCD
133
Abnormalities When Powering on
133
Abnormalities When Performing Rotational Operation
133
Troubleshooting While the STP Pump Is Rotating
134
Error Record" Message Display Function
134
Maintenance and Inspection
135
Replacing the Fuses
135
Cleaning
136
Maintenance
136
Storage, Transportation and Disposal
137
Storage of the SCU-800
137
Transporting for Repair or Overhaul
137
Disposal
138
Service, Spares and Accessories
139
Introduction
139
Service
139
Spares
139
Power Cable
140
Accessories
140
4
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Edwards SCU-800 Specifications
General
Brand
Edwards
Model
SCU-800
Category
Control Unit
Language
English
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