Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 141
7
SAFETY FUNCTIONS
Referred
Section
3.4.4
3.9
3.4.1
2.1
2.1
4.4.2
2.1
Table
42
-
Error List
Countermeasures
1.
Remove external vibration so as not to transmit it to the STP pump.
2.
Check the vacuum piping.
3.
Install the STP pump in a way that no foreign materials fall into the STP pump.
4.
Perform roughing vacuum through bypass root.
Contact Service office.
1.
Use the maximum working
pressure or less.
2.
Use the allowable backing
pressure or less.
3.
Check the vacuum piping
system for leakage.
4.
Check the backing-pump
for its capacity and START state. (use a backing-pump with
the recommended capacity
or more)
Probable causes
Excessive vibration applied
externally to the STP pump:
1.
External vibration/impact.
2.
Atmospheric air flows into the STP pump.
3.
Foreign materials fall into the STP pump.
4.
Sudden pressure change at start of roughing
vacuum by backing
-
pump
.
Abnormal magnetic bearing:
1.
Control circuit error.
2.
Disconnection of the internal wiring.
1.
High pressure at the inlet port.
2.
High pressure at the
outlet
port.
3.
Leakage of the piping system.
4.
Failure of the backing-pump.
Occurrence
condition
Excessive
imbalance
Acceleration
state
continues for
approx.
30
minutes
Pump operation
D
ecelerate and
stop
D
ecelerate and
stop
(Error message)
Disturbance X_H
Disturbance Y_H
Disturbance X_B
Disturbance Y_B
Disturbance Z
DRV Overload
"FAILURE"
LED
1 flash in red 2 flashes in red

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English