Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 142
7
SAFETY FUNCTIONS
Referred
Section
3.1.1
2.3
4.1
4.1
4.4.2
4.4
4.10.1
Table 43 - Error List (continued)
Countermeasures
1.
Set the ambient
temperature to 40 °C or less.
2.
Set the cooling water flow
rate at 3 L/min and cooling water temperature
between
1.
Set the temperature of the baking heater to 120 °C or less.
2.
Always cool the STP pump.
3.
Check the piping system for leakage.
4.
Repetitious start/stop operations may cause the STP pump to overheat.
Check the vacuum piping
system for leakage.
C
heck the exhaust sequence.
Turn "OFF" the
switch
to stop
the pump, and then turn "ON"
the
switch again to recover.
Probable causes
1.
High ambient temperature.
2.
Insufficient cooling of the control unit.
1.
Overheating during baking.
2.
Insufficient cooling.
3.
Leakage of the vacuum piping system.
4.
Repetitive start/stop operations.
Atmospheric air flows the STP
pump
.
Occurrence
condition
Overheating
inside the
control
unit
Overheating
inside the STP
pump
R
otational speed
increases
in brake
or Levitation state
Pump operation
D
ecelerate and
stop
D
ecelerate and
stop
D
ecelerate and
stop
(Error message)
CNT Overheat 1,
2
MOTOR
Overheat
Aberrant Accel
"FAILURE"
LED
3 flashes in red Steady red

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English