Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 143
7
SAFETY FUNCTIONS
Referred
Section
*1
The driver output stops and the rotor continue rotating by inertia. It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the STP pump.
Table 44 - Error List (continued)
Countermeasures
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Probable causes
Failure of the
control unit.
Failure of the
control unit.
Fail
ure of the control unit.
1.
Short-circuit or ground fault in the motor winding.
2.
Failure of the control unit.
Failure of the
control unit.
1.
Failure of the STP pump.
2.
Failure of the control unit.
Occurrence
condition
T
he rotation does
not
stop after 30
min.
into brake
state
Decelerate and
stop.
Co
mmunication
failure with m
otor
control board
Motor driver over
current
Motor driver over
voltage
Touch down. The
magnetic bearing
output stops and
the rotor is
descended on the
touch down
bearing.
Pump operation
D
ecelerate and
stop
C
ommunication
failure
in the
c
ontrol unit
D
ecelerate and
stop
Free run
*1
Free run
*1
Excessive
magnetic bearing
electric current
continues for 30
sec.
(Error message)
Aberrant Brake
AMB Com.
Failure
DRV Com.
Failure
DRV Overcurrent
DRV Ov
ervoltage
Inordint Current
"FAILURE"
LED
Steady red

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English