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Edwards STP Series User Manual

Edwards STP Series
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STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 144
7
SAFETY FUNCTIONS
Referred
Section
7.1.1
3.8.2
3.8.2
3.8.1
3.5
Table
45
-
Error List
(continued)
Countermeasures
Contact Service office.
Contact Service office.
1.
Check whether or not a
power failure has occurred.
2.
Connect the power cable
correctly.
3.
Replace the power cable.
4.
Set the rated voltage ±
10 %.
1.
Check the volume of water
and water temperature with
water cooling unit. In order
to recover, turn off the
power (switch "OFF"), and
then switch "ON" after
sufficient cooling of the
control unit
(isolate input power supply
3 minutes or more)
2.
Contact Service office.
Probable causes
D
isconnection of the motor
temperature
sensor.
Failure of the
control unit.
1.
Power failure.
2.
Incorrect connecti
on of the
power cable.
3.
Failure of the power cable.
4.
Failure of the power supply
vlotage.
1.
Insufficient cooling of the
control unit.
2.
Failure of the control unit.
Occurrence
condition
Abnormal
motor
temperature
detection
Rotaional speed
exceeds rated
speed
I
nsufficient power
supply
Overheat inside
the
control unit.
Pump operation
D
ecelerate and
stop
D
ecelerate and
stop
D
ecelerate and
stop
(Error message)
M_Temp Lost
Overspeed 1, 2,
3
Power Failure
"FAILURE"
LED
Steady red

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Edwards STP Series Specifications

General IconGeneral
BrandEdwards
ModelSTP Series
CategoryWater Pump
LanguageEnglish

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