STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 144
7
SAFETY FUNCTIONS
Referred
Section
Countermeasures
Check whether or not a
power failure has occurred.
Connect the power cable
correctly.
Replace the power cable.
Set the rated voltage ±
10 %.
Check the volume of water
and water temperature with
water cooling unit. In order
to recover, turn off the
power (switch "OFF"), and
then switch "ON" after
sufficient cooling of the
control unit
(isolate input power supply
3 minutes or more)
Contact Service office.
Probable causes
isconnection of the motor
sensor.
control unit.
Power failure.
Incorrect connecti
power cable.
Failure of the power cable.
Failure of the power supply
vlotage.
Insufficient cooling of the
control unit.
Failure of the control unit.
Occurrence
condition
motor
nsufficient power
control unit.
Pump operation
ecelerate and
ecelerate and
ecelerate and
(Error message)
"FAILURE"
LED
Steady red