Preventive Maintenance
4-52 © Essemtec AG Fox Maintenance
0000074/05
/ March 31, 2017
Flip over Valve Support Plate
For an easy access to the desired parts, the valve
support plate has to be flipped over.
Loosen and remove the two fixing screws (1).
If blow-off valves are mounted there are two
possibilities:
• Variant 1: loosen and remove the two valve
fixing screws (2).
• Variant 2: loosen and remove the three
fixing screws of the head bottom cover (3).
For the preventive maintenance, the head
bottom cover has not to be removed in case of
choosing variant 1.
For the corrective maintenance (Vacuum
Feedthrough Cleaning), the head bottom cover
has to be removed in any case.
Turn the valve support to the side.
Maintain ZT Element (Z linear axis / Theta rotation axis)
To maintain the ZT element, the head has not to be removed from the machine.
Clean and lubricate the spindle.
Using a soft and lint-free cloth, wipe off the dirty
grease. Afterwards lightly dampen a soft and
lint-free cloth with IPA Isopropyl alcohol and
wipe all spindles of the head as indicated in the
picture.
Lubricate the spindles slightly with Essemtec
P&P Head Grease (SP26/HG01) by means of a
brush (anytime keep the brush clean, free of
dust and metal powders). Do not apply too
much grease. Move manually the the Z-axis up
and down to apply evenly the grease. Wipe off
any excess.
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