Inficon Ecotec E3000 - Device Description; Function and Setup Overview

INFICON Description | 4
Ecotec E3000-Operating-instructions-kina22en1-28-(2211) 11 / 104
4 Description
4.1 Function and setup of the device
The Ecotec E3000 is comprised of main unit and sniffer line. The Ecotec E3000 can
verify and quantify gases sucked in by the sniffer line with the help of a selective mass
spectrometer.
Working in the Ecotec E3000:
• a Quadrupol mass spectrometer as a detection system
• a high-vacuum pump system
• an inlet system for the gas flow
• electrical and electronic sub-assemblies for electrical power supply and signal
processing
The mass spectrometer works under high vacuum, i.e. the pressure in the mass
spectrometer must always be below 10
-4
mbar. This vacuum is created by the turbo
molecular pump with the help of a diaphragm pump.