Inficon Ecotec E3000 User Manual

8 | Maintenance INFICON
76 / 104 Ecotec E3000-Operating-instructions-kina22en1-28-(2211)
8.2.1 Maintenance plan
Maintenance Material description Part number Operating hours Period Maintenan
ce level
500 2000 10000
Check the sinter filter of
the sniffer tip and
replace, if necessary
Sinter filter for sniffer
tip
200 03 500 X
1
I
Replace the filter inserts
of the capillary filters
and the water protection
tip.
Felt for capillary filter 200 001 116 X I
Clean or replace the
main air filter in the floor
of the housing
ECOTEC E3000 air
filter (104 x 154mm;
5pcs.)
200 001 552 X I
Check internal filters
and replace if necessary
(three pieces)
Internal filter 200 03 679 X II
Replace the oil wick
cartridge of the turbo
molecular pump
Oil wick cartridge
The date on the
packaging is the latest
possible installation
date.
200 003 801 3years II
Replacing the
diaphragms of the
diaphragm pump
Wear parts set for
diaphragm pump
200 03 504 X III
Replace gas store no
later than after 2years
of operation. Maximum
shelf life: storage plus
operation: 3years
Replacement gas
store
531-010 2years
Table10: Maintenance plan
1 Heavier soiling of the measurement environment can also require earlier
replacement.
Explanation of maintenance levels:
Maintenance level I: Customer without any technical training
Maintenance level II: Customer with technical and INFICON training
Maintenance level III: INFICON Service

Inficon Ecotec E3000 Specifications

General

Brand	Inficon
Model	Ecotec E3000
Category	Security Sensors
Language	English