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Inficon Ecotec E3000 User Manual

Inficon Ecotec E3000
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INFICON Maintenance | 8
Ecotec E3000-Operating-instructions-kina22en1-28-(2211) 77 / 104
8.2.2 Replacing the air filter of the main unit
The air filter is inside a duct that is accessible from the bottom of the device. The slot
is closed with a cover plate. The cover plate is held in place with a 3mm Allen screw.
DANGER
Risk of death from electric shock
There are high voltages inside the device. Touching parts where electrical voltage is
present can result in death.
Disconnect the device from the power supply prior to any installation and
maintenance work.
Ensure that the electrical supply cannot be switched back on unintentionally.
NOTICE
Property damage from rotating parts
The turbo molecular pump requires 5minutes to power down.
Allow the turbo molecular pump to power down before any maintenance work is
performed or before moving the device.
Fig.46: Loosening the air filter cover
1. Remove the sniffer line and the ECO-Check from the basic unit.
2. Place the basic unit with the front panel on a soft surface.
3. Loosen the screw of the cover plate until you can rotate the cover plate to the side.
4. Pull out the air filter and replace it with a new one.
5. Retighten the cover plate in front of the duct.
6. Put the device back on its feet and connect sniffer line and ECO-Check, if needed.
7. Confirm the work, see "Calling up and managing maintenance information [}71]."

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Inficon Ecotec E3000 Specifications

General IconGeneral
BrandInficon
ModelEcotec E3000
CategorySecurity Sensors
LanguageEnglish

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