INFICON Maintenance | 8
Ecotec E3000-Operating-instructions-kina22en1-28-(2211) 75 / 104
DANGER
Risk of death from electric shock
There are high voltages inside the device. Touching parts where electrical voltage is
present can result in death.
► Disconnect the device from the power supply prior to any installation and
maintenance work.
► Ensure that the electrical supply cannot be switched back on unintentionally.
NOTICE
Property damage from rotating parts
The turbo molecular pump requires 5minutes to power down.
► Allow the turbo molecular pump to power down before any maintenance work is
performed or before moving the device.
You will need the following tools for maintenance work:
• 2 screwdrivers, size 2
• Box wrench, 19mm (included in the delivery scope)
• Allen wrench, 8 mm (included in the scope of delivery)
• Allen wrench, 3 mm (not included in the scope of delivery)
• Tweezers
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