Inficon Ecotec E3000 User Manual

7 | Warning and error messages INFICON
70 / 104 Ecotec E3000-Operating-instructions-kina22en1-28-(2211)
No. Message Possible error sources Fault rectification
E96 Error in the
temperature control of
the TC (E025)
The main air filter is soiled. Clean or replace the filter, see
Replacing the filter inserts of the
capillary filter and the water
conservation tip [}80].
The ambient temperature is too high. Confirm the work, see Calling up and
managing maintenance information
[}71].
E97 Error of the
temperature sensor in
the TC (E026)
The temperature sensor is defective. Contact INFICON customer service.
E98 Error in the motor stage
or the control (E037)
There is an error in the motor stages
or the control.
Contact INFICON customer service.
E99 Error on the power
supply (F007)
The supply voltage has failed. Contact INFICON customer service.
Table9: Warning and error messages
* The work may be carried out only by service personnel who have been authorized by
INFICON.

Inficon Ecotec E3000 Specifications

General

Brand	Inficon
Model	Ecotec E3000
Category	Security Sensors
Language	English