Inficon Ecotec E3000 - Page 95

INFICON Appendix | 10
Ecotec E3000-Operating-instructions-kina22en1-28-(2211) 95 / 104
Gas Formula Other
designation
Measuring
position
(xxx amu)
Molecular
mass
(xxx.x amu)
Fragmentati
on factor
Normalizatio
n factor
(x.xExx)
Viscosity
He Helium 4 4 1.00 3.00E+07 1.000
CO
2
R744 44 44 1.00 1.00E+08 0.744
HT135 Galden
HT135
100 610 0.08 1.20E+07 1.000
69 1.00
119 0.45
169 0.42
131 0.03
Kr Krypton 84 84 1.00 7.00E+07 1.275
N
2
Nitrogen 28 28 1.00 7.00E+07 0.892
Ne Neon 20 20.2 1.00 7.00E+07 1.586
NH
3
R717 17 17 1.00 7.00E+07 0.505
O
2
Oxygen 32 32 1.00 7.00E+07 1.030
SF
6
127 146.1 0.80 9.10E+07 0.765
Xe Xenon 129 131.3 1.00 1.20E+08 1.153
132 1.00
ZT130 Galden
ZT130
100 497 0.25 7.00E+07 1.000
117 0.32
119 1.00
69 0.50
135 0.12
Table11: Gas library