Inficon UL6000 Fab - Page 102

7 | Warning and error messages INFICON
102 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
Type Notification Possible sources of
error
Remedy
W254 Valve current is out of range One or more lowered
valves are not
connected or defective
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W255 Fan current is out of range Fan not connected • Contact customer service
Fan blocked or
defective
• Contact customer service
W300 Anode voltage too low Short circuit of the
anode voltage
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W301 Anode voltage too high MSB defective • Contact customer service
W302 Suppressor voltage too low Short circuit of
suppressor or
preamplifier
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W303 Suppressor voltage too high MSB defective • Contact customer service
W304 Anode-cathode voltage too
low
Short circuit between
anode and cathode
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W305 Anode-cathode voltage too
high
MSB defective • Contact customer service
E306 Anode voltage incorrect The anode voltage set
value is outside the
allowable range
• Perform a calibration
• Contact customer service
MSB defective • Contact customer service
W310 Cathode 1 broken Cathode defective • Check that the other cathode has been
switched on
• Contact customer service
Connection to cathode
broken
• Contact customer service
VI-Board or MSB
defective
• Contact customer service