EasyManua.ls Logo

Inficon UL6000 Fab - Page 103

Inficon UL6000 Fab
152 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
INFICON Warning and error messages | 7
UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206) 103 / 152
Type Notification Possible sources of
error
Remedy
W311 Cathode 2 broken Cathode defective Check that the other cathode has been
switched on
Contact customer service
Connection to cathode
broken
Contact customer service
VI-Board or MSB
defective
Contact customer service
E312 Cathodes broken Both cathodes
defective
Contact customer service
Connection to cathode
broken
Contact customer service
VI-Board or MSB
defective
Contact customer service
E340 Emission error Pressure too high with
aged cathode
Contact customer service
W342 Cathodes not connected Both cathodes
defective during self-
test
Contact customer service
Plug of ion source not
connected
Contact customer service
W350 Suppressor not connected Suppressor cable not
connected or defective
Contact customer service
E352 Preamplifier not connected Preamplifier defective
or cable not connected
Contact customer service
W358 Alternate preamplifier
ranges
Preamplifier defective Contact customer service
Unusual leak rate
waveform
Contact customer service
W359 Overdriven preamplifier Mass spectrometer
contaminated
Check the tightness of the connection
between the leak detector and the test
object
Reduce contamination in the environment
where the device is located
Use the 'Regeneration' function in the
'Vacuum' operation mode
Ion source or
preamplifier defective
Contact customer service

Table of Contents

Related product manuals