MKS 651C - Page 13

List of Tables
xi
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole.......................................................6
Tableau 3 : Définition des symboles apparaissant sur l'appareil .................................................10
Tabla 4 : Definición de los símbolos que aparecen en la unidad.................................................14
Table 5: Fuse Information ........................................................................................................24
Table 6: Summary of Front Panel Components.........................................................................28
Table 7: Slot Labels .................................................................................................................31
Table 8: Serial RS-232 Interface Connector Pinout...................................................................32
Table 9: RS-232 Serial Communication Cables........................................................................33
Table 10: I/O Connector Pinout................................................................................................34
Table 11: Transducer Connector Pinout....................................................................................36
Table 12: System Interface Cables for MKS Transducers .........................................................36
Table 13: Valve Connector Pinout............................................................................................37
Table 14: System Interface Cables for MKS Throttle Valves....................................................37
Table 15: Sensor Range Values ................................................................................................67
Table 16: Priority of Digital Inputs...........................................................................................92
Table 17: Digital Input Functions..............................................................................................93
Table 18: Digital Output Functions ..........................................................................................95
Table 19: Expected Battery Life.............................................................................................108
Table 20: Capacity Loss of Stored Battery..............................................................................108
Table 21: Transducer Current Available from Low and High Power Units..............................117
Table 22: 651 Adapter Cables.................................................................................................118
Table 23: Default Dipswitch Settings .....................................................................................122
Table 24: I/O Board Dipswitch Bank and RS-232 Communications Settings..........................123
Table 25: Initial Settings ........................................................................................................125
Table 26: RS-232 Command Summary ..................................................................................128
Table 27: RS-232 Request and Response Summary................................................................134