MKS 651C - Sensor Setup

Chapter Four: System Setup Setu
p
Menu
43
Sensor Setup
The 651 controller is initially configured to use Torr as the pressure units, 100 Torr as the sensor
full scale range, 0 to 10 Volts for the sensor input signal, and 0 to 5 Volts for the analog set point
input. Follow the steps below to change any of these parameters.
1. Be sure that the sensor is connected to the 651 unit.
2. From the
delimiter
display, scroll to the next topic.
SENSOR RANGE:
10.000
3. Scroll through the display list until the range of the sensor connected to the unit appears.
Note
To view the range of a sensor in pressure units of
mbar
for a sensor
calibrated in
Torr
, select the equivalent mbar unit of measure. For
example, select 13.332 for a sensor calibrated to 10.000 Torr.
To display a 1 Torr sensor in
mTorr
, the appropriate sensor range and
pressure unit must be entered during setup. For example, 1000
mTorr
must be entered to display a 1 Torr sensor in
mTorr
.
The display list includes the following sensor ranges:
.10000
.20000
.5000
1.0000 1.3332
2.0000 2.6664
5.000
10.000 13.332
50.00
100.00
*
133.32
500.0
1000.0 1333.2
5000 6666
10000 13332
* initial value