MKS 651C - Request and Response Reference; Table 27: RS-232 Request and Response Summary

Request and Response Reference A
pp
endix F: Command and Re
q
uest Reference
134
Request and Response Reference
A
request
to the 651 controller causes it to send back information. Refer to Table 27 for a
complete list of request messages.
Note
To conserve space, the
ENTER
key is not included in the request
messages listed the following tables. You must press the
ENTER
key to
send the request message to the 651 controller.
Res
p
onse messa
g
e do not contain s
p
aces. S
p
aces are used in the res
p
onse
messages to improve readability.
RS-232 Requests and Response Summary
Request Message Information Requested Response Message
R0
Analog set point value
S0
value
where
value
is % of F.S.
R1
Set point A value
S1
value
.
where
value
is % of F.S.
R2
Set point B value
S2
value
where
value
is % of F.S.
R3
Set point C value
S3
value
.
where
value
is % of F.S.
R4
Set point D value
S4 value
where
value
is % of F.S.
R5
System pressure value
P
value
where
value
is % of F.S.
Table 27: RS-232 Request and Response Summary
(Continued on next page)
Note
Unless specified otherwise, the
value
in a response is a percent value.
For example, a response of
S1+30.00
means the set point value is 30%
of F.S. For a 10 Torr F. S. unit, the set point would be 3 Torr.