MKS 651C - Table 13: Valve Connector Pinout; Table 14: System Interface Cables for MKS Throttle Valves

Chapter Three: Overview Rear Panel
37
Valve Connector Pinout
Pin Number Function
1 Motor winding A low
2 Motor winding A high
3 Limit switch ground
4 Open limit switch signal
5 Closed limit switch signal
6 Motor winding B high
7 Motor winding B low
8 +15 V @25 mA (for Opto switches)
Table 13: Valve Connector Pinout
System Interface Cables for MKS Throttle Valves
Valve Type Number Cable Number
253A CB652-2-10
653A CB652-1-10
Table 14: System Interface Cables for MKS Throttle Valves