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MKS 651C - Page 49

MKS 651C
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Chapter Three: Overview Rear Panel
35
I/O Connector Pinout
(Continued)
Pin
Number
Function
25 Remote zero (low)
26 Stop valve (low)
27 Open valve (low)
28 PLO #2 status (low = out of limit)
29 PLO #1 status (low = out of limit)
30 +15V Output
31 -15V Output
32 Power ground
33 + Set point input
34 - Set point input
35 Analog ground
36 Pressure output voltage
37 Position output voltage
A
Reserved
pin assignment means that the pin has an internal connection and may be
assigned a function in the future. The
No Connection
pin assignment refers to a pin with
no internal connection.
Table 10: I/O Connector Pinout

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