System Service Mode
SM Appendix 8-55 M065/M066
Appendix:
SP Mode
Tables
012 M. Cor.: Subdot: C *ENG
[–15 to 15 / 0 / 1 pulse/step]
014 Mag.Cor. Subdot: C *ENG [–2040 to 2040 / 0 / 1 pulse/step]
015 M. Left Mag.: Subdot: C *ENG
[–1020 to 1020 / 0 / 1 pulse/step]
016 M. Right Mag.: Subdot: C *ENG
017 S. Cor.: 600 Line: C *ENG
[–800 to 800 / 0 / 1 line/step]
018 S. Cor.: 600 Subdot: C *ENG
[–2 to 2 / 0 / 0.001 line/step]
019 S. Cor.: 1200 Line: C *ENG
[–1600 to 1600 / 0 / 1 line/step]
020 S. Cor.: 1200 Subdot: C *ENG
[–2 to 2 / 0 / 0.001 line/step]
021 Skew: M *ENG
[–5000 to 5000 / 0 / 0.001 um/step]
023 M. Scan Shift: Left: M *ENG
[–16000 to 16000 / 0 / 0.001 um/step]
024 M. Scan Shift: Center: M *ENG
025 M. Scan Shift: Right: M *ENG
026 S. Scan Shift: Left: M *ENG
[–21000 to 21000 / 0 / 0.001 um/step]
027 S. Scan Shift: Center: M *ENG
028 S. Scan Shift: Right: M *ENG
029 M. Cor.: Dot: M *ENG
[–511 to 511 / 0 / 1 dot/step]
030 M. Cor.: Subdot: M *ENG
[–15 to 15 / 0 / 1 pulse/step]
032 Mag.Cor. Subdot: M *ENG [–2040 to 2040 / 0 / 1 pulse/step]
033 M. Left Mag.: Subdot: M *ENG
[–1020 to 1020 / 0 / 1 pulse/step]
034 M. Right Mag.: Subdot: M *ENG
035 S. Cor.: 600 Line: M *ENG
[–800 to 800 / 0 / 1 line/step]
036 S. Cor.: 600 Subdot: M *ENG
[–2 to 2 / 0 / 0.001 line/step]
037 S. Cor.: 1200 Line: M *ENG
[–1600 to 1600 / 0 / 1 line/step]
038 S. Cor.: 1200 Subdot: M *ENG
[–2 to 2 / 0 / 0.001 line/step]
039 Skew: Y *ENG
[–5000 to 5000 / 0 / 0.001 um/step]