Column
Incident monochromator crystal
The incident monochromator crystal system uses diffraction by Ge or Si crystals for x-ray monochromatization.
Ge(220)x2 crystals and Ge(440)x4 crystals are available as options for SmartLab. Select the appropriate crystal
based on the resolution required for measurements and the sample (d value). As an example, the Ge(220)x2 crystal
monochromatizes x-rays by diffracting them twice by Ge(220) lattice planes. Passing x-rays through this crystal
makes it possible to use only Kα
1
x-rays with about 0.003 degree divergence. Shown below are the types and
resolutions of monochromator crystals and corresponding applications.
Table Types and resolutions of incident monochromator crystals
Type of
crystal
Resolution
(FWHM)
Applications
Ge(220)x2
crystal
0.008º<
For applications requiring monochromatized Kα1
x-rays or for measurements of materials with
diffraction planes with d spacings of ca. 2 Å.
Ge(400)x2
crystal
0.0022º
(when sample d
spacing is 1.41A)
For measurements of materials with diffraction
planes with d spacings of ca. 1.4 Å.
Ge(220)x4
crystals
0.0033º<
For applications requiring high resolution over a
broad 2-theta range.
Ge(440)x4
crystals
0.0015º<
For applications requiring very high resolution over
a broad 2-theta range.
2-theta/omega scan profile of Si(001) single crystal wafer measured with
different incident optics systems
61.00 63.00 65.00 67.00 69.00
2
θ/ω
[deg]
強度 [任意単位]
スリットコリメーション
Ge(220)
2
結晶
Ge(220)
4
結晶
69.00 69.10 69.20
拡大
Cu Kβ
W-Lα
Slit collimation
Ge(220)2 crystal
Ge(220)4 crystal
Zoo
view
Intensity [unspecified unit]
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