SmartLab: Automated Multipurpose X-ray Diffractometer 3
Product Features
High-accuracy theta-theta goniometer
A theta-theta goniometer enables omega scans, 2-theta/omega scans, and 2-theta
scans with the sample oriented horizontally (deviation from horizontal
orientation may occur if sample orientation is adjusted). The horizontal
positioning of a sample minimizes the distortion effects caused by weight in the
case of a large wafer while reducing the possibility of a dropped sample.
Additionally, the two axes are equipped with encoders to enable control of each
axis at a resolution of 0.0001º.
Attachment
XY attachment for automated XY mapping or an RxRy attachment for sample
tilt alignment to be conducted before in-plane or reciprocal space map (RSM)
measurement. A newly developed connector allows easy changing of
attachments.
X-ray generator
Even with a horizontal sample mount goniometer with a moving x-ray source,
the product can incorporate a state of the art high-intensity 9 kW rotating anode
x-ray generator. When combined with a multilayer mirror, this x-ray generator
produces a high intensity x-ray beam (approx. 6 to 7 times the intensity provided
by a sealed-tube system) equal to an 18-kW rotating anode x-ray generator,
while reducing power consumption by 50% due to the high-brightness focal spot.
The system also offers lower operating costs compared to earlier models. A 3 kW
sealed tube x-ray generator can also be used with the SmartLab system. The
specifications of each generator are summarized in the following table.
Table Generator specifications
Max. load Max. voltage Max. current Target metal
9 kW rotating anode *1 9 kW 45 kV 200 mA Cu
3 kW sealed tube *2 3 kW 60 kV 50 mA Cu
*1 : 2080A211/2080A411
*2 : 2080B211/2080B212/2080B411
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