IX-2
Measurements, scan
Automated
4-10
Manual 4-4
Mechanical hazards
1-4
Meta data, selecting and viewing 4-22
Monitor 2-7, 2-8
O
Online help 5-2
Optics, adjusting illumination 3-5
P
Power On and Off switches 1-2
Power supply adapter 2-4, 2-5
Powering down 3-3
Powering up 3-1
Pressure hazards 1-4
R
Ribbon in Vision64 5-10
Ribbon tabs 5-10
S
Safety features
Emergency Off button
1-1
Power On and Off switches 1-2
Safety precautions 1-2
Sample fixtures for stages 2-3
Scanning process 4-8
Signal processor 2-5
Software key 3-1
Software leveling 4-16
Stage
Configurations
2-2
Controlling the X-Y auto 2-3
Controlling the theta auto 3-9
Manually leveling 3-6
Sample fixtures (chucks) 2-3
Using the manual positioning controls 3-6
Step height standard 2-9
Stored data, viewing and analyzing 4-23
Stylus
Cleaning the tip
3-16
Removing 3-13
Installing a new 3-10
T
Theta stage control 3-9
Tower assembly 2-3
Towering up and down 3-5
Turning on the system 3-1
U
Units, changing 5-10
User preferences, changing 5-10
V
Vision recipes 4-22
Vision Views 5-3
Vision64
Closing
5-1
Described 2-2, 2-7
Directories 5-2
Elements of the workspace 5-3
Interface explained 5-1
Online help 5-2
Opening 5-1
Selecting windows for display 5-3
Starting 3-2
Vision Views 5-3
W
Wafer vacuum sample fixture 2-3
X
X-Y auto stage, manually leveling 3-6