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5.3.
Utility gases and exhaust piping
5.3.1. Nitrogen supply
The ACM 150 monitor requires a constant supply of nitrogen, which is used as a dry purge
gas for the optics bench and as a zero gas for the Background cycle. The requirements
are:
Source
Plant bulk nitrogen supply or N
2
cylinders
Quality 99.9% or better
External Pressure Regulator/Shut-off
Located near the ACM 150 monitor (by installation
contractor)
Delivery Pressure
Set the external regulator to 5 psig (0.35
kg/cm
2
Connection
1/4-inch tube fitting (per Figure 25)
Consumption Less than 8 liters/minute, intermittent
5.3.2. Air Supply
Compressed air is required to operate the venturi pumps. It is also used for the optional
Line Leak Test:
Source
Clean, dry compressed air (CDA) or instrument-
grade
Quality
Filtered and oil-free with a dew point of -20°F (-
29°C)
External Pressure Regulator/Shut-off
Locate near the ACM 150 monitor (by installation
contractor)
Pressure
75-80 psig. Set on the internal regulator
(included)
Connection
3/8-inch tube fitting (per Figure 25)
Consumption Venturi pumps 12 scfm (340 lpm)
CAUTION
High-pressure air is used inside the venturi pumps and can be hazardous. Shut off
the air supply and verify that no stored pressure is present before servicing the
venturi pumps.